A Mode-Localized Micro-Electromechanical System Accelerometer with Force Rebalance Closed-Loop Control

This article proposes a force rebalance control scheme based on a mode-localized resonant accelerometer (ML-RXL), which is applied to address the limited measurement range problem of the ML-RXL. For the first time, an empirical response model of the weakly coupling resonators for the amplitude ratio...

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Bibliographic Details
Published in:	Micromachines
Main Authors:	Bowen Wang, Zhenxiang Qi, Kunfeng Wang, Zhaoyang Zhai, Zheng Wang, Xudong Zou
Format:	Article
Language:	English
Published:	MDPI AG 2025-02-01
Subjects:	MEMS accelerometer mode localization amplitude ratio force rebalance
Online Access:	https://www.mdpi.com/2072-666X/16/3/248

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