3-Bit Digital-to-Analog Converter with Mechanical Amplifier for Binary Encoded Large Displacements

We present the design, fabrication, and characterization of a MEMS-based 3-bit Digital-to-Analog Converter (DAC) that allows the generation of large displacements. The DAC consists of electrostatic bending-plate actuators that are connected to a mechanical amplifier (mechAMP), enabling the amplifica...

Full description

Bibliographic Details

Published in:	Actuators
Main Authors:	Lisa Schmitt, Philip Schmitt, Martin Hoffmann
Format:	Article
Language:	English
Published:	MDPI AG 2021-08-01
Subjects:	digital-to-analog converter DAC large displacements electrostatic bending-plate actuator mechanical amplifier mechAMP
Online Access:	https://www.mdpi.com/2076-0825/10/8/182