Self-Calibrated Humidity Sensor in CMOS without Post-Processing

A 1.1 µW power dissipation, voltage-output humidity sensor with 10% relative humidity accuracy was developed in the LFoundry 0.15 µm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a humidity-sensitive layer of Interv...

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Bibliographic Details

Published in:	Sensors
Main Authors:	Kazusuke Maenaka, Kohei Higuchi, Oleg Nizhnik
Format:	Article
Language:	English
Published:	MDPI AG 2011-12-01
Subjects:	capacitive sensors microsensors humidity measurement CMOS integrated circuits
Online Access:	http://www.mdpi.com/1424-8220/12/1/226/