Design and Optimization of a Stationary Electrode in a Vertically-Driven MEMS Inertial Switch for Extending Contact Duration

A novel micro-electro-mechanical systems (MEMS) inertial microswitch with a flexible contact-enhanced structure to extend the contact duration has been proposed in the present work. In order to investigate the stiffness k of the stationary electrodes, the stationary electrodes with different shapes,...

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Bibliographic Details

Published in:	Sensors
Main Authors:	Qiu Xu, Zhuo-Qing Yang, Bo Fu, Yan-Ping Bao, Hao Wu, Yun-Na Sun, Meng-Yuan Zhao, Jian Li, Gui-Fu Ding, Xiao-Lin Zhao
Format:	Article
Language:	English
Published:	MDPI AG 2017-03-01
Subjects:	inertial micro-switch surface-micromachining stationary electrode geometrical parameters contact time
Online Access:	http://www.mdpi.com/1424-8220/17/3/527