Inline Mapping of Amorphous Silicon Layer Thickness of Heterojunction Precursors Using Multispectral Imaging

In this paper, we present an inline characterization technique to determine spatially resolved thickness maps of ultra-thin layers on textured silicon substrates. The technique is based on multispectral imaging and optical modelling of discrete spectral reflectance data using rigorous polarization...

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Bibliographic Details

Published in:	SiliconPV Conference Proceedings
Main Authors:	Saravana Kumar, Christian Diestel, Saed Al-Hajjawi, Jurriaan Schmitz, Marc Hemsendorf, Jonas Haunschild, Stefan J. Rupitsch, Stefan Rein
Format:	Article
Language:	English
Published:	TIB Open Publishing 2025-01-01
Subjects:	Amorphous Silicon Inline Characterization Silicon Heterojunction Solar Cells Thickness Maps Multispectral Imaging
Online Access:	https://www.tib-op.org/ojs/index.php/siliconpv/article/view/1324