MEMS Varifocal Optical Elements for Focus Control

As microelectronic devices become more prevalent daily, miniaturization is emerging as a key trend, particularly in optical systems. Optical systems with volume scanning and imaging capabilities heavily rely on focus control. The traditional focus tuning method restricts the miniaturization of optic...

Full description

Bibliographic Details
Published in:Micromachines
Main Authors: Chen Liu, Tong Wang, Xin Wang, Manpeng Chang, Yu Jian, Weimin Wang
Format: Article
Language:English
Published: MDPI AG 2025-04-01
Subjects:
MOEMS
focus control
varifocal mirror
tunable lens
micro-optical system
Online Access:https://www.mdpi.com/2072-666X/16/4/482

Internet

https://www.mdpi.com/2072-666X/16/4/482

Similar Items