Rapid Fabrication of Yttrium Aluminum Garnet Microhole Array Based on Femtosecond Bessel Beam

High-aspect-ratio microholes, the fundamental building blocks for microfluidics, optical waveguides, and other devices, find wide applications in aerospace, biomedical, and photonics fields. Yttrium aluminum garnet (YAG) crystals are commonly used in optical devices due to their low stress, hardness...

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Bibliographic Details
Published in:Photonics
Main Authors: Heng Yang, Yuan Yu, Tong Zhang, Shufang Ma, Lin Chen, Bingshe Xu, Zhiyong Wang
Format: Article
Language:English
Published: MDPI AG 2024-04-01
Subjects:
femtosecond lasers
microhole array
Bessel beam
laser processing
yttrium aluminum garnet
Online Access:https://www.mdpi.com/2304-6732/11/5/408

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https://www.mdpi.com/2304-6732/11/5/408

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