SnO<sub>2</sub>-Pd as a Gate Material for the Capacitor Type Gas Sensor
The article describes the result of the use SnO<sub>2</sub>-Pd thin films as a gate for structure measured ppb range of NO<sub>2</sub> gas by the capacitive method. The technological aspects of fabrication SnO<sub>2</sub>-Pd gate and one comparison by metrological...
| Published in: | Proceedings |
|---|---|
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-06-01
|
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/14/1/10 |