A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications

This paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and the membrane gap is formed by sacrificial layer r...

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Bibliographic Details

Published in:	Sensors
Main Authors:	Fangming Deng, Yigang He, Bing Li, Lei Zuo, Xiang Wu, Zhihui Fu
Format:	Article
Language:	English
Published:	MDPI AG 2015-03-01
Subjects:	pressure sensor RFID technology CMOS process capacitive sensor interface rectifier
Online Access:	http://www.mdpi.com/1424-8220/15/3/6872