Electron-induced deposition using Fe(CO)4MA and Fe(CO)5 – effect of MA ligand and process conditions

The electron-induced decomposition of Fe(CO)4MA (MA = methyl acrylate), which is a potential new precursor for focused electron beam-induced deposition (FEBID), was investigated by surface science experiments under UHV conditions. Auger electron spectroscopy was used to monitor deposit formation. Th...

詳細記述

書誌詳細

出版年:	Beilstein Journal of Nanotechnology
主要な著者:	Hannah Boeckers, Atul Chaudhary, Petra Martinović, Amy V. Walker, Lisa McElwee-White, Petra Swiderek
フォーマット:	論文
言語:	英語
出版事項:	Beilstein-Institut 2024-05-01
主題:	autocatalytic growth cryo-ebid electron beam-induced deposition heteroleptic iron precursor thermal surface reactions
オンライン･アクセス:	https://doi.org/10.3762/bjnano.15.45