Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip

A humidity microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process was presented. The integrated sensor chip consists of a humidity sensor and a readout circuit. The humidity sensor is composed of a sensit...

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Bibliographic Details

Published in:	Sensors
Main Authors:	Yu-Chih Hu, Ching-Liang Dai, Cheng-Chih Hsu
Format:	Article
Language:	English
Published:	MDPI AG 2014-03-01
Subjects:	integrtaed humidity microsensor titanium dioxide readout circuit
Online Access:	http://www.mdpi.com/1424-8220/14/3/4177