Nanotribological Characteristics of the Al Content of Al<sub>x</sub>Ga<sub>1−x</sub>N Epitaxial Films
The nanotribological properties of aluminum gallium nitride (Al<sub>x</sub>Ga<sub>1−x</sub>N) epitaxial films grown on low-temperature-grown GaN/AlN/Si substrates were investigated using a nanoscratch system. It was confirmed that the Al compositions played an important role,...
| Published in: | Nanomaterials |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-10-01
|
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-4991/13/21/2884 |