A Capacitive MEMS Inclinometer Sensor with Wide Dynamic Range and Improved Sensitivity

This paper proposes a novel capacitive liquid metal microelectromechanical system (MEMS) inclinometer sensor and introduces its design, fabrication, and signal measurement. The sensor was constructed using three-layer substrates. A conductive liquid droplet was rolled along an annular groove of the...

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發表在:	Sensors
Main Authors:	HanYang Xu, Yulong Zhao, Kai Zhang, Kyle Jiang
格式:	Article
語言:	英语
出版:	MDPI AG 2020-07-01
主題:	liquid MEMS inclinometer sensor array capacitor super-hydrophobic wide measurement range
在線閱讀:	https://www.mdpi.com/1424-8220/20/13/3711