Complex illumination system for fast interferometric measurements
Freeform metrology is an enabling technology for today’s research and advanced manufacturing. The Tilted Wave Interferometer is a full field measurement system for fast and flexible measurements. It is based on an off-axis illumination scheme based on a microlens array. In this contribution, we pres...
| الحاوية / القاعدة: | EPJ Web of Conferences |
|---|---|
| المؤلفون الرئيسيون: | , , , , |
| التنسيق: | مقال |
| اللغة: | الإنجليزية |
| منشور في: |
EDP Sciences
2023-01-01
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| الوصول للمادة أونلاين: | https://www.epj-conferences.org/articles/epjconf/pdf/2023/13/epjconf_eosam2023_02002.pdf |