Piezoelectric Shunt Damping for a Planar Motor Application under Cryogenic Conditions

For several decades, Moore’s law has driven the semiconductor industry, with computational power and production costs as the main drivers. Such drivers have enabled several technological innovations in the mechatronics and dynamics architecture of photolithography machines, used for semiconductor ci...

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Bibliographic Details

Published in:	Actuators
Main Authors:	Niek Ambaum, Bilal Mokrani, Hans Vermeulen
Format:	Article
Language:	English
Published:	MDPI AG 2024-10-01
Subjects:	photolithography piezoelectric shunts RL shunt damping structural dynamics superconductive magnets
Online Access:	https://www.mdpi.com/2076-0825/13/10/405