Development of a Novel Design and Modeling of MEMS Piezoelectric Cantilever-Based Chemical Sensors
The analytical modeling of thin-film, multilayered piezoelectric microcantilevers is presented in this work. Piezoelectric microcantilevers were used in chemical sensors. Different types of probe coatings were applied to these types of microcantilevers. A position-sensitive sensor (PSS) system was u...
| 发表在: | Engineering Proceedings |
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| Main Authors: | , , |
| 格式: | 文件 |
| 语言: | 英语 |
| 出版: |
MDPI AG
2023-10-01
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| 主题: | |
| 在线阅读: | https://www.mdpi.com/2673-4591/56/1/105 |