Polarization Gradient Effect of Negative Capacitance LTFET

In this paper, an L-shaped tunneling field effect transistor (LTFET) with ferroelectric gate oxide layer (Si: HfO<sub>2</sub>) is proposed. The electric characteristic of NC-LTFET is analyzed using Synopsys Sentaurus TCAD. Compared with the conventional LTFET, a steeper subthreshold swin...

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التفاصيل البيبلوغرافية
الحاوية / القاعدة:Micromachines
المؤلفون الرئيسيون: Hao Zhang, Shupeng Chen, Hongxia Liu, Shulong Wang, Dong Wang, Xiaoyang Fan, Chen Chong, Chenyu Yin, Tianzhi Gao
التنسيق: مقال
اللغة:الإنجليزية
منشور في: MDPI AG 2022-02-01
الموضوعات:
الوصول للمادة أونلاين:https://www.mdpi.com/2072-666X/13/3/344
_version_ 1850342608770957312
author Hao Zhang
Shupeng Chen
Hongxia Liu
Shulong Wang
Dong Wang
Xiaoyang Fan
Chen Chong
Chenyu Yin
Tianzhi Gao
author_facet Hao Zhang
Shupeng Chen
Hongxia Liu
Shulong Wang
Dong Wang
Xiaoyang Fan
Chen Chong
Chenyu Yin
Tianzhi Gao
author_sort Hao Zhang
collection DOAJ
container_title Micromachines
description In this paper, an L-shaped tunneling field effect transistor (LTFET) with ferroelectric gate oxide layer (Si: HfO<sub>2</sub>) is proposed. The electric characteristic of NC-LTFET is analyzed using Synopsys Sentaurus TCAD. Compared with the conventional LTFET, a steeper subthreshold swing (SS = 18.4 mV/dec) of NC-LTFET is obtained by the mechanism of line tunneling at low gate voltage instead of diagonal tunneling, which is caused by the non-uniform voltage across the gate oxide layer. In addition, we report the polarization gradient effect in a negative capacitance TFET for the first time. It is noted that the polarization gradient effect should not be ignored in TFET. When the polarization gradient parameter g grows larger, the dominant tunneling mechanism that affects the SS is the diagonal tunneling. The on-state current (I<sub>on</sub>) and SS of NC-LTFET become worse.
format Article
id doaj-art-d35337c0cfd5410a861fca7ea2f2b83a
institution Directory of Open Access Journals
issn 2072-666X
language English
publishDate 2022-02-01
publisher MDPI AG
record_format Article
spelling doaj-art-d35337c0cfd5410a861fca7ea2f2b83a2025-08-19T23:13:35ZengMDPI AGMicromachines2072-666X2022-02-0113334410.3390/mi13030344Polarization Gradient Effect of Negative Capacitance LTFETHao Zhang0Shupeng Chen1Hongxia Liu2Shulong Wang3Dong Wang4Xiaoyang Fan5Chen Chong6Chenyu Yin7Tianzhi Gao8Key Laboratory for Wide-Band Gap Semiconductor Materials and Devices of Education, School of Microelectronics, Xidian University, Xi’an 710071, ChinaKey Laboratory for Wide-Band Gap Semiconductor Materials and Devices of Education, School of Microelectronics, Xidian University, Xi’an 710071, ChinaKey Laboratory for Wide-Band Gap Semiconductor Materials and Devices of Education, School of Microelectronics, Xidian University, Xi’an 710071, ChinaKey Laboratory for Wide-Band Gap Semiconductor Materials and Devices of Education, School of Microelectronics, Xidian University, Xi’an 710071, ChinaKey Laboratory for Wide-Band Gap Semiconductor Materials and Devices of Education, School of Microelectronics, Xidian University, Xi’an 710071, ChinaKey Laboratory for Wide-Band Gap Semiconductor Materials and Devices of Education, School of Microelectronics, Xidian University, Xi’an 710071, ChinaKey Laboratory for Wide-Band Gap Semiconductor Materials and Devices of Education, School of Microelectronics, Xidian University, Xi’an 710071, ChinaKey Laboratory for Wide-Band Gap Semiconductor Materials and Devices of Education, School of Microelectronics, Xidian University, Xi’an 710071, ChinaKey Laboratory for Wide-Band Gap Semiconductor Materials and Devices of Education, School of Microelectronics, Xidian University, Xi’an 710071, ChinaIn this paper, an L-shaped tunneling field effect transistor (LTFET) with ferroelectric gate oxide layer (Si: HfO<sub>2</sub>) is proposed. The electric characteristic of NC-LTFET is analyzed using Synopsys Sentaurus TCAD. Compared with the conventional LTFET, a steeper subthreshold swing (SS = 18.4 mV/dec) of NC-LTFET is obtained by the mechanism of line tunneling at low gate voltage instead of diagonal tunneling, which is caused by the non-uniform voltage across the gate oxide layer. In addition, we report the polarization gradient effect in a negative capacitance TFET for the first time. It is noted that the polarization gradient effect should not be ignored in TFET. When the polarization gradient parameter g grows larger, the dominant tunneling mechanism that affects the SS is the diagonal tunneling. The on-state current (I<sub>on</sub>) and SS of NC-LTFET become worse.https://www.mdpi.com/2072-666X/13/3/344NC-LTFETsubthreshold swingferroelectric gate oxidepolarization gradient
spellingShingle Hao Zhang
Shupeng Chen
Hongxia Liu
Shulong Wang
Dong Wang
Xiaoyang Fan
Chen Chong
Chenyu Yin
Tianzhi Gao
Polarization Gradient Effect of Negative Capacitance LTFET
NC-LTFET
subthreshold swing
ferroelectric gate oxide
polarization gradient
title Polarization Gradient Effect of Negative Capacitance LTFET
title_full Polarization Gradient Effect of Negative Capacitance LTFET
title_fullStr Polarization Gradient Effect of Negative Capacitance LTFET
title_full_unstemmed Polarization Gradient Effect of Negative Capacitance LTFET
title_short Polarization Gradient Effect of Negative Capacitance LTFET
title_sort polarization gradient effect of negative capacitance ltfet
topic NC-LTFET
subthreshold swing
ferroelectric gate oxide
polarization gradient
url https://www.mdpi.com/2072-666X/13/3/344
work_keys_str_mv AT haozhang polarizationgradienteffectofnegativecapacitanceltfet
AT shupengchen polarizationgradienteffectofnegativecapacitanceltfet
AT hongxialiu polarizationgradienteffectofnegativecapacitanceltfet
AT shulongwang polarizationgradienteffectofnegativecapacitanceltfet
AT dongwang polarizationgradienteffectofnegativecapacitanceltfet
AT xiaoyangfan polarizationgradienteffectofnegativecapacitanceltfet
AT chenchong polarizationgradienteffectofnegativecapacitanceltfet
AT chenyuyin polarizationgradienteffectofnegativecapacitanceltfet
AT tianzhigao polarizationgradienteffectofnegativecapacitanceltfet