High-Precision Ultra-Long Air Slit Fabrication Based on MEMS Technology for Imaging Spectrometers

The increasing demand for accurate imaging spectral information in remote sensing detection has driven the development of hyperspectral remote sensing instruments towards a larger view field and higher resolution. As the core component of the spectrometer slit, the designed length reaches tens of mi...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Xiaoyu Ren, Selina X. Yao, Jiacheng Zhu, Zejun Deng, Yijia Wang, Baoshun Zhang, Zhongming Zeng, Hao Zhai
Format:	Article
Language:	English
Published:	MDPI AG 2023-11-01
Subjects:	MEMS DRIE air slit spectrometer
Online Access:	https://www.mdpi.com/2072-666X/14/12/2198