Synthesis of Vertical Carbon Nanotube Interconnect Structures Using CMOS-Compatible Catalysts

Synthesis of the vertically aligned carbon nanotubes (CNTs) using complementary metal-oxide-semiconductor (CMOS)-compatible methods is essential to integrate the CNT contact and interconnect to nanoscale devices and ultra-dense integrated nanoelectronics. However, the synthesis of high-density CNT a...

Full description

Bibliographic Details

Published in:	Nanomaterials
Main Authors:	Zichao Ma, Shaolin Zhou, Changjian Zhou, Ying Xiao, Suwen Li, Mansun Chan
Format:	Article
Language:	English
Published:	MDPI AG 2020-09-01
Subjects:	carbon nanotube CMOS-compatible catalyst design interconnect
Online Access:	https://www.mdpi.com/2079-4991/10/10/1918