Combination of Material Processing and Characterization Methods for Miniaturization of Field-Effect Gas Sensor

The technological approach for the low-scale production of field-effect gas sensors as electronic components for use in non-lab ambient environments is described. In this work, in addition to the mechanical protection of a gas-sensitive structure, an emphasis was also placed on the very topical issu...

وصف كامل

التفاصيل البيبلوغرافية

الحاوية / القاعدة:	Sensors
المؤلفون الرئيسيون:	Nikolay Samotaev, Artur Litvinov, Konstantin Oblov, Maya Etrekova, Boris Podlepetsky, Pavel Dzhumaev
التنسيق:	مقال
اللغة:	الإنجليزية
منشور في:	MDPI AG 2023-01-01
الموضوعات:	field-effect gas sensor laser micromilling pulse laser deposition metal–ceramics package tomography
الوصول للمادة أونلاين:	https://www.mdpi.com/1424-8220/23/1/514