SPECTROSCOPY STUDY OF PLASMAS IN PAPVD AND PACVD PROCESSES USING NITROGEN AS FILLED GAS IN THE COATINGS PRODUCTION

In this work a study of plasma characteristics used in the production of polymeric coatings by PACVD techniques (Plasma Assisted Chemical Vapor Deposition) using Glow Discharge, and TiN coatings produced by means of PAPVD (Plasma Assisted Physical Vapor Deposition) using a pulsed arc discharge was c...

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Bibliographic Details

Published in:	Momento
Main Authors:	Mónica Botero, Diana M. Devia, Elisabeth Restrepo Parra
Format:	Article
Language:	English
Published:	Universidad Nacional de Colombia 2013-01-01
Subjects:	OES PACVD PAPVD plasma Polímeros Recubrimientos TiN.
Online Access:	https://revistas.unal.edu.co/index.php/momento/article/view/41551