The Growth Mechanism of Boron-Doped Diamond in Relation to the Carbon-to-Hydrogen Ratio Using the Hot-Filament Chemical Vapor Deposition Method

This study synthesized boron-doped diamond (BDD) thin films using hot-filament chemical vapor deposition at different carbon-to-hydrogen (C/H) ratios in the range of 0.3–0.9%. The C/H ratio influence, a key parameter controlling the balance between diamond growth and hydrogen-assisted etching, was s...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Taekyeong Lee, Miyoung You, Seohan Kim, Pungkeun Song
Format:	Article
Language:	English
Published:	MDPI AG 2025-06-01
Subjects:	hot-filament chemical vapor deposition (HF-CVD) boron-doped diamond (BDD) carbon-to-hydrogen ratio (C/H ratio)
Online Access:	https://www.mdpi.com/2072-666X/16/7/742