MEMS Micromirror Actuation Techniques: A Comprehensive Review of Trends, Innovations, and Future Prospects

Micromirrors have recently emerged as an essential component in optical scanning technology, attracting considerable attention from researchers. Their compact size and versatile capabilities, such as light steering, modulation, and switching, are leading them as potential alternatives to traditional...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Mansoor Ahmad, Mohamed Bahri, Mohamad Sawan
Format:	Article
Language:	English
Published:	MDPI AG 2024-09-01
Subjects:	MEMSs MEMSs mirrors microactuators microelectromechanical systems micromirrors optical scanning
Online Access:	https://www.mdpi.com/2072-666X/15/10/1233