Optimizing the Ferroelectric Performance of Hf0.5Zr0.5O2 Epitaxial Film by La0.67Sr0.33MnO3 Capping Layer

Abstract Hafnium‐oxide‐based ferroelectrics have garnered considerable research interest, primarily for their robust ferroelectricity at the nanoscale and their high compatibility with complementary metal‐oxide‐semiconductors processes. However, the impact of electrodes on the ferroelectric properti...

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Bibliographic Details

Published in:	Advanced Electronic Materials
Main Authors:	Kuan Liu, Kai Liu, Xingchang Zhang, Feng Jin, Jie Fang, Enda Hua, Huan Ye, Jinfeng Zhang, Zhengguo Liang, Qiming Lv, Wenbin Wu, Chao Ma, Lingfei Wang
Format:	Article
Language:	English
Published:	Wiley-VCH 2024-10-01
Subjects:	epitaxial thin films ferroelectric domains Hf0.5Zr0.5O2 rhombohedral phase top electrodes
Online Access:	https://doi.org/10.1002/aelm.202400136