Insight into the Propagation of Interface Acoustic Waves in Rotated YX-LiNbO<sub>3</sub>/SU-8/Si Structures
The propagation of interface acoustic waves (IAWs) along rotated YX-LiNbO<sub>3</sub>/SU-8/ZX-Si structures is theoretically investigated to identify the Y-rotation angles that support the efficient propagation of low-loss modes guided along the structure’s interface. A three-dimensional...
| 出版年: | Micromachines |
|---|---|
| 主要な著者: | , , , |
| フォーマット: | 論文 |
| 言語: | 英語 |
| 出版事項: |
MDPI AG
2025-07-01
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| 主題: | |
| オンライン･アクセス: | https://www.mdpi.com/2072-666X/16/8/861 |