Experimental study on synthesis of single crystal diamond by hot filament chemical vapor deposition method

The deposition area of the hot filament chemical vapor deposition (HFCVD) method can reach 12 inches, which has the potential to produce larger-sized single crystal diamonds. In this study, single crystal diamond with a size of 3 mm × 3 mm × 1 mm and (100) orientation was used as the substrate. Homo...

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Bibliographic Details

Published in:	Jin'gangshi yu moliao moju gongcheng
Main Authors:	Chuan ZHANG, Dongdong LIU, Ming LU, Fanghong SUN
Format:	Article
Language:	Chinese
Published:	Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd. 2024-06-01
Subjects:	hot filament chemical vapor deposition single crystal diamond optimization of deposition parameters nitrogen doping
Online Access:	http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2023.0101