A Spherically-Shaped PZT Thin Film Ultrasonic Transducer with an Acoustic Impedance Gradient Matching Layer Based on a Micromachined Periodically Structured Flexible Substrate

This paper presents the microfabrication of an acoustic impedance gradient matching layer on a spherically-shaped piezoelectric ultrasonic transducer. The acoustic matching layer can be designed to achieve higher acoustic energy transmission and operating bandwidth. Also included in this paper are a...

Full description

Bibliographic Details

Published in:	Sensors
Main Authors:	Wei-Fan Liu, Guo-Hua Feng
Format:	Article
Language:	English
Published:	MDPI AG 2013-10-01
Subjects:	PZT film ultrasonic transducer micromachining acoustic impedance
Online Access:	http://www.mdpi.com/1424-8220/13/10/13543