Deeper Insight into the Mechanisms Behind Sputter Damage in Silicon Solar Cells Based on the Example of Nanocrystalline Silicon Carbide

Abstract Transparent conducting oxides, like indium tin oxide, enable lateral charge carrier transport in silicon heterojunction solar cells. However, their deposition can damage the passivation quality in the solar cell. This damage during the sputter deposition is a complex issue that has not been...

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Bibliographic Details

Published in:	Advanced Physics Research
Main Authors:	Alexander Eberst, Binbin Xu, Karsten Bittkau, Weiyuan Duan, Andreas Lambertz, Ansgar Meise, Marc Heggen, Rafal E. Dunin‐Borkowski, Uwe Rau, Kaining Ding
Format:	Article
Language:	English
Published:	Wiley-VCH 2024-09-01
Subjects:	amorphous silicons silicon carbides silicon heterojunctions sputter damage transparent passivating contacts
Online Access:	https://doi.org/10.1002/apxr.202400036