Spin-Coater Machine Control Via Passivity With Sliding Modes

In this paper, a novel control scheme for a spin-coater machine is presented, based on Passivity and Sliding Modes. The machine is used to make semiconductor thin films with a centrifugation force. A brushless direct current motor was selected as an actuator, its mathematical model is presented, inc...

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Bibliographic Details

Published in:	IEEE Access
Main Authors:	Hector Huerta, Nimrod Vazquez
Format:	Article
Language:	English
Published:	IEEE 2020-01-01
Subjects:	Brushless motors nonlinear control systems sliding mode control spinning machines
Online Access:	https://ieeexplore.ieee.org/document/8954717/