Fabrication and Characterization of Gas Sensor from ZrO2: MgO Nanostructure Thin Films by R.F. Magnetron Sputtering Technique

Thin films ZrO2: MgO nanostructure have been synthesized by a radio frequency magnetron plasma sputtering technique at different ratios of MgO (0,6, 8 and  10)% percentage to be used as the gas sensor for nitrogen dioxide NO2. The samples were investigated by X-ray diffraction (XRD), atomic force mi...

Full description

Bibliographic Details

Published in:	مجلة بغداد للعلوم
Main Author:	Khalil et al.
Format:	Article
Language:	English
Published:	University of Baghdad, College of Science for Women 2019-03-01
Subjects:	Gas sensor, NO2 gas, Plasma sputtering technique, Sensitivity, ZrO2: MgO thin films
Online Access:	http://bsj.uobaghdad.edu.iq/index.php/BSJ/article/view/3233