APA (7th ed.) Citation

Tang, Z., Gu, L., Ma, H., Mao, C., Wu, S., Zhang, N., . . . Fan, J. (2022, December). Influence of Temperature and Flow Ratio on the Morphology and Uniformity of 4H-SiC Epitaxial Layers Growth on 150 mm 4° Off-Axis Substrates. Crystals.

Chicago Style (17th ed.) Citation

Tang, Zhuorui, Lin Gu, Hongping Ma, Chaobin Mao, Sanzhong Wu, Nan Zhang, Jiyu Huang, and Jiajie Fan. "Influence of Temperature and Flow Ratio on the Morphology and Uniformity of 4H-SiC Epitaxial Layers Growth on 150 Mm 4° Off-Axis Substrates." Crystals Dec. 2022.

MLA (9th ed.) Citation

Tang, Zhuorui, et al. "Influence of Temperature and Flow Ratio on the Morphology and Uniformity of 4H-SiC Epitaxial Layers Growth on 150 Mm 4° Off-Axis Substrates." Crystals, Dec. 2022.