Development of Piezoelectrically Driven Quasi-Static 2D MEMS Mirrors with Extremely Large FoV for Scanning LiDARs

In this paper, a piezoelectrically driven quasi-static MEMS mirror is developed for a scanning LiDAR system. Finite element method (FEM) simulations are used to optimize the design of the MEMS scanner. With special emphasis on the shape and thickness of the actuators, they are optimized to reach a m...

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發表在:	Proceedings
Main Authors:	Paul Raschdorf, Jeong-Yeon Hwang, Lena Wysocki, Lianzhi Wen, Jörg Albers, Gunnar Wille, Erdem Yarar, Shanshan Gu-Stoppel
格式:	Article
語言:	英语
出版:	MDPI AG 2024-03-01
主題:	MEMS MEMS mirror design optimization silicon technology optics
在線閱讀:	https://www.mdpi.com/2504-3900/97/1/124