Highly efficient polishing of polycrystalline CVD diamond via atmosphere inductively coupled plasma

Objectives: As a typical difficult-to-machine material, polycrystalline CVD diamond often requires sophisticated and time-consuming polishing methods to achieve a smooth surface. In this study, a non-contact polishing method based on atmospheric inductively coupled plasma is investigated for the pol...

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Bibliographic Details

Published in:	Jin'gangshi yu moliao moju gongcheng
Main Authors:	Yuxi XIAO, Xinyu LI, Yongjie ZHANG, Hui DENG
Format:	Article
Language:	Chinese
Published:	Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd. 2024-10-01
Subjects:	polycrystalline cvd diamond highly efficient polishing atmosphere inductively coupled plasma highly active oxygen radicals
Online Access:	http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2023.0281