Fabricating Metal Powder Filters with Material Extrusion Additive Manufacturing

Metal powder filters are key components in semiconductor manufacturing equipment that play a critical role in preventing the ingress of impurities and fine particles that may be contained in process gases. With the increasingly advanced development of the semiconductor industry, metal powder filters...

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Bibliographic Details

Published in:	Archives of Metallurgy and Materials
Main Authors:	Min-Ji Kim, Min-Jeong Lee, Hyun-Ju Kim, Ju-Yong Kim, Jung-Woo Lee, Jung-Yeul Yun
Format:	Article
Language:	English
Published:	Polish Academy of Sciences 2025-09-01
Subjects:	metal powder filters sintering porosity air permeability material extrusion additive manufacturing (meam)
Online Access:	https://journals.pan.pl/Content/136805/AMM-2025-3-16-Jung-Yeul%20Yun.pdf