Fabrication and high-resolution transmission electron microscopy characterization of nanopores in silicon nitride and 2D materials

Bibliographic Details
Published in:BIO Web of Conferences
Main Authors: Tang Teresa, Kögel Marco, Mierzejewski Michael, Schlegel Michael, Jones Peter D., Meyer Jannik C.
Format: Article
Language:English
Published: EDP Sciences 2024-01-01
Subjects:
Online Access:https://www.bio-conferences.org/articles/bioconf/pdf/2024/48/bioconf_emc2024_22043.pdf