APA (7th ed.) Citation

Valle, T. V. F. d., Mariani, S., Ghisi, A., Masi, B. D., Rizzini, F., Gattere, G., & Valzasina, C. (2023, February). MEMS Reliability: On-Chip Testing for the Characterization of the Out-of-Plane Polysilicon Strength. Micromachines.

Chicago Style (17th ed.) Citation

Valle, Tiago Vicentini Ferreira do, Stefano Mariani, Aldo Ghisi, Biagio De Masi, Francesco Rizzini, Gabriele Gattere, and Carlo Valzasina. "MEMS Reliability: On-Chip Testing for the Characterization of the Out-of-Plane Polysilicon Strength." Micromachines Feb. 2023.

MLA (9th ed.) Citation

Valle, Tiago Vicentini Ferreira do, et al. "MEMS Reliability: On-Chip Testing for the Characterization of the Out-of-Plane Polysilicon Strength." Micromachines, Feb. 2023.