Ohmi, S., Ohtaguchi, Y., Ihara, A., & Morita, H. (2021, January). Ferroelectric Hafnium Nitride Thin Films Directly Formed on Si(100) Substrate. IEEE Journal of the Electron Devices Society.
Chicago Style (17th ed.) CitationOhmi, S., Y. Ohtaguchi, A. Ihara, and H. Morita. "Ferroelectric Hafnium Nitride Thin Films Directly Formed on Si(100) Substrate." IEEE Journal of the Electron Devices Society Jan. 2021.
MLA (9th ed.) CitationOhmi, S., et al. "Ferroelectric Hafnium Nitride Thin Films Directly Formed on Si(100) Substrate." IEEE Journal of the Electron Devices Society, Jan. 2021.
Warning: These citations may not always be 100% accurate.