Synchrotron XANES studies of epitaxial tin-silicon solid solutions nanolayers

Purpose: Functional tin and silicon-based materials and thin-film structures based on them are promising objects for microelectronics devices. An important issue for the study and subsequent application of such materials and structures is the properties control under formation technological regimes...

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書目詳細資料
發表在:Конденсированные среды и межфазные границы
Main Authors: Nikolai I. Boikov, Olga A. Chuvenkova, Elena V. Parinova, Ratibor G. Chumakov, Alexei M. Lebedev, Dmitry Smirnov, Anna Makarova, Sofiia S. Titova, Kirill A. Fateev, Sergey Yu. Turishchev
格式: Article
語言:英语
出版: Voronezh State University 2025-09-01
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在線閱讀:https://journals.vsu.ru/kcmf/article/view/13201/13340