Integrated silicon photonic MEMS

Abstract Silicon photonics has emerged as a mature technology that is expected to play a key role in critical emerging applications, including very high data rate optical communications, distance sensing for autonomous vehicles, photonic-accelerated computing, and quantum information processing. The...

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Bibliographic Details
Published in:Microsystems & Nanoengineering
Main Authors: Niels Quack, Alain Yuji Takabayashi, Hamed Sattari, Pierre Edinger, Gaehun Jo, Simon J. Bleiker, Carlos Errando-Herranz, Kristinn B. Gylfason, Frank Niklaus, Umar Khan, Peter Verheyen, Arun Kumar Mallik, Jun Su Lee, Moises Jezzini, Iman Zand, Padraic Morrissey, Cleitus Antony, Peter O’Brien, Wim Bogaerts
Format: Article
Language:English
Published: Nature Publishing Group 2023-03-01
Online Access:https://doi.org/10.1038/s41378-023-00498-z

Internet

https://doi.org/10.1038/s41378-023-00498-z

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