Optimizing the Electrode Geometry of an In-Plane Unimorph Piezoelectric Microactuator for Maximum Deflection

Piezoelectric microactuators have been widely used for actuation, sensing, and energy harvesting. While out-of-plane piezoelectric configurations are well established, both in-plane deflection and asymmetric electrode placement have been underexplored in terms of actuation efficiency. This study exp...

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Bibliographic Details

Published in:	Modelling
Main Authors:	Parker Megginson, Jason Clark, Ryan Clarson
Format:	Article
Language:	English
Published:	MDPI AG 2024-08-01
Subjects:	piezoelectric planar actuator microactuators microelectromechanical systems MEMS
Online Access:	https://www.mdpi.com/2673-3951/5/3/56