Terahertz Biaxial Strain Sensor Based on Double-Upright Cross Metamaterial

In this article, a terahertz metamaterial biaxial strain pressure sensor structure is proposed, which can address the problems of the low sensitivity, the narrow pressure measurement range, and the uniaxial-only detection of existing terahertz pressure sensors. The performance of the pressure sensor...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Yanfei Liu, Yu Chen, Jing Li, Chunli Zhang, Qiannan Wu, Ningning Su, Mengwei Li
Format:	Article
Language:	English
Published:	MDPI AG 2023-04-01
Subjects:	terahertz metamaterial biaxial strain pressure sensor
Online Access:	https://www.mdpi.com/2072-666X/14/4/816