Effects of Annealing Temperature on the Structural, Surface, and Optical Properties of PZT Thin Films Deposited by Sputtering on Al₂O₃ Substrates

This study investigates the structural, morphological, and optical properties of PZT (lead zirconate titanate) thin films deposited on Al2O3 substrates via RF sputtering, with a particular focus on the effects of annealing temperature. The films were annealed at 500°C, 600°C, a...

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Bibliographic Details

Published in:	IEEE Access
Main Authors:	M. Ozden, O. Coban, T. Karacali
Format:	Article
Language:	English
Published:	IEEE 2025-01-01
Subjects:	Annealing temperature lead-zirconate-titanate PZT thin film RF sputtering
Online Access:	https://ieeexplore.ieee.org/document/11203970/