New Super-Junction LDMOS Based on Poly-Si Thin-Film Transistors

A multi-channel super-junction lateral doubled-diffused MOSFET (SJ-LDMOS) that is developed from thin film transistor technology is proposed. To optimize the breakdown voltage (VBD) and to reduce the specific on-resistance (R<sub>SP</sub>), a new structure called REC-SJ LDMOS, with two s...

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Bibliographic Details
Published in:IEEE Journal of the Electron Devices Society
Main Authors: Jhen-Yu Tsai, Hsin-Hui Hu
Format: Article
Language:English
Published: IEEE 2016-01-01
Subjects:
Online Access:https://ieeexplore.ieee.org/document/7543503/