Research on the SAW Gyroscopic Effect in a Double-Layer Substrate Structure Incorporating Non-Piezoelectric Materials

The SAW (surface acoustic wave) gyroscopic effect is a key parameter that reflects the sensitivity performance of SAW angular velocity sensors. This study found that adding a layer of non-piezoelectric material with a lower reflection coefficient than that of the upper-layer material below the piezo...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Hengbiao Chen, Lili Meng, Mengjiao Lu, Ziwen Song, Wen Wang, Xiuting Shao
Format:	Article
Language:	English
Published:	MDPI AG 2023-09-01
Subjects:	reflection coefficient SAW angular velocity sensor SAW gyroscopic effect double-layer substrate structure three-dimensional model
Online Access:	https://www.mdpi.com/2072-666X/14/10/1834