Comparison of properties of multilayer film sputtered on glass and polypropylene substrates with angular DC magnetron Co-sputtering system

Complex multilayer film structures were fabricated through a custom-built angular DC magnetron co-sputtering system. In this system, separate Cu, Al, and brass (Cu + Zn) targets were mounted on three magnetron guns, working in conjunction with a rotating substrate. This study aimed to compare the pr...

全面介紹

書目詳細資料

發表在:	Heliyon
Main Authors:	Preecha Changyom, Komgrit Leksakul, Dheerawan Boonyawan, Pongsawat Premphet, Norrapon Vichiansan
格式:	Article
語言:	英语
出版:	Elsevier 2023-11-01
主題:	Magnetron sputtering Angular sputtering Co-sputtering Multilayer sputtering
在線閱讀:	http://www.sciencedirect.com/science/article/pii/S2405844023094550