Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching

Periodic nanostructures have wide applications in micro-optics, bionics, and optoelectronics. Here, a laser interference with subsequent etching technology is proposed to fabricate uniform periodic nanostructures with controllable morphologies and smooth surfaces on hard materials. One-dimensional m...

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Bibliographic Details
Published in:Nanomaterials
Main Authors: Shuang-Ning Yang, Xue-Qing Liu, Jia-Xin Zheng, Yi-Ming Lu, Bing-Rong Gao
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Subjects:
microstructure
GaAs
laser interference
dry etching
Online Access:https://www.mdpi.com/2079-4991/10/7/1313

Internet

https://www.mdpi.com/2079-4991/10/7/1313

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