Optimization of Fully Integrated Al Nanohole Array-Based Refractive Index Sensors for Use With a LED Light Source

Plasmonic nanohole arrays that are directly structured into the top metallization of vertical Ge-on-Si PIN photodiodes can be used to sense refractive index changes. This concept can pave the way to fully integrated biosensors with small footprint and high sensitivities. Here, we show that by optimi...

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Bibliographic Details

Published in:	IEEE Photonics Journal
Main Authors:	Fritz Berkmann, Lion Augel, Michael Hack, Yuma Kawaguchi, David Weishaupt, Inga A. Fischer, Jorg Schulze
Format:	Article
Language:	English
Published:	IEEE 2022-01-01
Subjects:	Biosensor CMOS integration nanohole-array plasmonic refractive index sensor
Online Access:	https://ieeexplore.ieee.org/document/9781306/