Photoconductive Properties of Polycrystalline Silicon Thin Film Annealed at High Pressure of Deuterium
In a polysilicon-based photodetector structure, a polysilicon film is important because it acts as both a light-absorption layer and a conductive path. The grain boundary inside polysilicon acts as an energy barrier to the movement of carriers, and research on its passivation has been attempted. In...
| Published in: | IEEE Access |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2024-01-01
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| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10714351/ |