Extended-Aperture Shape Measurements Using Spatially Partially Coherent Illumination (ExASPICE)

We have recently demonstrated that the 3D shape of micro-parts can be measured using LED illumination based on speckle contrast evaluation in the recently developed SPICE profilometry (shape measurements based on imaging with spatially partially coherent illumination). The main advantage of SPICE is...

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Bibliographic Details
Published in:Sensors
Main Authors: Mostafa Agour, Claas Falldorf, Ralf B. Bergmann
Format: Article
Language:English
Published: MDPI AG 2024-05-01
Subjects:
optical metrology
shape measurements
partially coherent illumination
depth discrimination
Online Access:https://www.mdpi.com/1424-8220/24/10/3072

Internet

https://www.mdpi.com/1424-8220/24/10/3072

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