Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer

At present, there are few methods to measure optical pressure using MEMS. However, due to its high precision and fast response, a ridge waveguide pressure sensor based on a Mach–Zehnder interferometer is designed in this paper. Through the design and optimization of each component of the structure,...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Chen Li, Chi Zhang, Lijun Yang, Fangtong Guo
Format:	Article
Language:	English
Published:	MDPI AG 2022-08-01
Subjects:	silicon on insulator pressure sensor Mach–Zehnder interferometer directional coupler ridge waveguide
Online Access:	https://www.mdpi.com/2072-666X/13/8/1321